Transmission Electron Microscopy in Micro-nanoelectronics

Published by Wiley & Sons

31 January 2013
Researchers from CEMES, Leti and STMicroelectronics have written and edited a book presenting in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face to optimize semiconductor devices.

ISBN: 9781848213678
Publication Date: December 2012

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